ILS Series positioning stages have been developed as buffers at each stage of glass substrate processing for simply positioning glass substrates buffer cassettes.
Since we have developed ILS stage units, there has been worldwide market demand for positioning cassettes especially the large types G7 and G8 mother glasses in FPD industries processing systems as well as the small types for updating existing processing systems. The ILS Series positioning stages upper plate rolls smoothly in any 360 degree direction. Despite their compactness, they also can carry heavy loads than conventional type and set the substrate cassette at a desired position. The cassettes are then unloaded by AGV to let the ILS upper plate return to its original position to load the next cassette. Instead of returning the upper plate of ILS stage unit to its original position, an S type is also available to hold the stage at an unloading position.